Study on formation of SiGe Nanorod arrays by Nanosphere Lithography & Au-assisted chemical etching
碩士 === 國立中央大學 === 材料科學與工程研究所 === 98 === Over the past few decades, the synthesis and characterization of Si-based nanostructures got much attention in research interests due to their intrinsic physical properties. There is a particular method called self-assembly which provides a possible a way to f...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46019866738890934240 |