Phase shift interferometric imaging ellipsometer
碩士 === 國立中央大學 === 光電科學研究所 === 98 === In this thesis, a phase shift interferometric imaging ellipsometer (PSIIE) is developed and set up by utilizing a liquid crystal variable retarder (LCVR) of which the phase retardance is programmable. A LCVR is used and introduces phase modulation in PSIIE workin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/00320416488255267701 |