Phase shift interferometric imaging ellipsometer
碩士 === 國立中央大學 === 光電科學研究所 === 98 === In this thesis, a phase shift interferometric imaging ellipsometer (PSIIE) is developed and set up by utilizing a liquid crystal variable retarder (LCVR) of which the phase retardance is programmable. A LCVR is used and introduces phase modulation in PSIIE workin...
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ndltd-TW-098NCU056140082015-10-13T13:43:19Z http://ndltd.ncl.edu.tw/handle/00320416488255267701 Phase shift interferometric imaging ellipsometer 相移干涉影像式橢圓儀 Chen Lyu Rong 陳律融 碩士 國立中央大學 光電科學研究所 98 In this thesis, a phase shift interferometric imaging ellipsometer (PSIIE) is developed and set up by utilizing a liquid crystal variable retarder (LCVR) of which the phase retardance is programmable. A LCVR is used and introduces phase modulation in PSIIE working as a phase shifting interferometer. Thus the ellipsometric parameters of specimen are able to be measured accurately. Because the phase retardation of LCVR is modulated by the amplitude of square waveform directly, therefore, PSIE becomes much simplified than conventional photo-elastic modulator (PEM) for phase modulation. As a result, PSIE shows advantage compared with stroboscopic illumination photoelastic modulated imaging ellipsometer. In this thesis, the working principle and calibration procedure of PSIE are described. By testing a given specimen, the experimental verification of PSIE was verified experimentally. Chien Chou Cheng-Chung Lee 周晟 李正中 2009 學位論文 ; thesis 46 zh-TW |
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碩士 === 國立中央大學 === 光電科學研究所 === 98 === In this thesis, a phase shift interferometric imaging ellipsometer (PSIIE) is developed and set up by utilizing a liquid crystal variable retarder (LCVR) of which the phase retardance is programmable. A LCVR is used and introduces phase modulation in PSIIE working as a phase shifting interferometer. Thus the ellipsometric parameters of specimen are able to be measured accurately.
Because the phase retardation of LCVR is modulated by the amplitude of square waveform directly, therefore, PSIE becomes much simplified than conventional photo-elastic modulator (PEM) for phase modulation. As a result, PSIE shows advantage compared with stroboscopic illumination photoelastic modulated imaging ellipsometer. In this thesis, the working principle and calibration procedure of PSIE are described. By testing a given specimen, the experimental verification of PSIE was verified experimentally.
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Chien Chou |
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Chien Chou Chen Lyu Rong 陳律融 |
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Chen Lyu Rong 陳律融 |
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Chen Lyu Rong 陳律融 Phase shift interferometric imaging ellipsometer |
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Chen Lyu Rong |
title |
Phase shift interferometric imaging ellipsometer |
title_short |
Phase shift interferometric imaging ellipsometer |
title_full |
Phase shift interferometric imaging ellipsometer |
title_fullStr |
Phase shift interferometric imaging ellipsometer |
title_full_unstemmed |
Phase shift interferometric imaging ellipsometer |
title_sort |
phase shift interferometric imaging ellipsometer |
publishDate |
2009 |
url |
http://ndltd.ncl.edu.tw/handle/00320416488255267701 |
work_keys_str_mv |
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