Phase shift interferometric imaging ellipsometer

• Main Authors: Chen Lyu Rong, 陳律融
• Other Authors: Chien Chou
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/00320416488255267701

碩士 === 國立中央大學 === 光電科學研究所 === 98 === In this thesis, a phase shift interferometric imaging ellipsometer (PSIIE) is developed and set up by utilizing a liquid crystal variable retarder (LCVR) of which the phase retardance is programmable. A LCVR is used and introduces phase modulation in PSIIE working as a phase shifting interferometer. Thus the ellipsometric parameters of specimen are able to be measured accurately. Because the phase retardation of LCVR is modulated by the amplitude of square waveform directly, therefore, PSIE becomes much simplified than conventional photo-elastic modulator (PEM) for phase modulation. As a result, PSIE shows advantage compared with stroboscopic illumination photoelastic modulated imaging ellipsometer. In this thesis, the working principle and calibration procedure of PSIE are described. By testing a given specimen, the experimental verification of PSIE was verified experimentally.