Design and processing parameter study of dry-film-resist laminator
碩士 === 國立彰化師範大學 === 機電工程學系 === 98 === This study focuses on the investigation and problem analyses of dry film resist lamination in micro-fabrication processes. Compared to the photoresist spin coating, dry film lamination offers less mal-development and plug-hole problems. In general, dry film lam...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34822438532713211192 |