RF magnetron sputtering preparation of MgO films for gate dielectric application
碩士 === 國立彰化師範大學 === 光電科技研究所 === 98 === The MgO permittivity and leakage currents through Au(In)/MgO/n-type Si/In and Au(In)/MgO/p-type Si/Au structures were studied in the study. From the observed x-ray photoelectron spectroscopy,scanning electron microscopy, secondary ion mass spectrometry and ell...
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| Format: | Others |
| Language: | zh-TW |
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2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/82646401529936473457 |