Analysis of the Piezoelectric Properties of PZT Thin films due to the thickness of sol-gel derived LSMO buffer layer Using Micro-vibration Devices
碩士 === 國立高雄第一科技大學 === 機械與自動化工程所 === 98 === This study investigated the applications of Sol-Gel derived lead zirconate titanate (PZT) piezoelectric thin film and lanthanum strontium manganese oxide (LSMO) buffer layer. The influence of the LSMO films for the PZT thin film properties was analyzed to i...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30452047666469750737 |