Effect of Cu and Mg Doping on the Microstructure and Phase Transition of Zinc Titanate Thin Film
碩士 === 國立屏東科技大學 === 材料工程所 === 98 === In this study, Cu or Mg doped zinc titanate thin films were prepared by RF magnetron sputtering system. The Cu doped contents, oxygen concentrations and annealing conditions are chosen as experimental parameters. Cu doped zinc titanate (ZnTiO3) films were prepare...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/91218300166940373042 |