Using electrochemistry method measure AlN thin film porosity
碩士 === 國立屏東科技大學 === 機械工程系所 === 98 === Physical vapor deposition coated metal or nonmetal thin film in the substrate to get quality batter or to obtain fine optical and electron properties in semiconductor. Using this way increased hardness, wear, corrosion properties of material. It can’t be avo...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/27336769153355537743 |