Variations of ZnO Ultraviolet Photodetector with Different Sputtering Parameters
碩士 === 國立屏東科技大學 === 機械工程系所 === 98 === In this thesis, the ultraviolet (UV) photodetector is fabricated using metal - semiconductor – metal sturcture. The Zinc Oxide (ZnO) thin films is chosen as the active layer, which the material and optical properties are investigated. This thesis is mainly compr...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/97648010333085922063 |