Study of m-plane ZnO Grown by Radio Frequency Magnetron Sputtering
碩士 === 國立中山大學 === 物理學系研究所 === 98 === M-plane (101 ¯0) ZnO thin films were grown on m-plane sapphire (101 ¯0) substrates by RF magnetron sputtering. We varied the RF power, working pressure, and O2/Ar ratio to obtain the best growth conditions. Structural properties were investigated by X-ray diffrac...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/21356026041819806990 |