Semiconductor Assembly Manufacturing Industry Control of Volatile Organic Compounds by Wet Scrubbing and Advanced Oxidation Technology--Case Feasibility Studies of Full-Scale Plant--
碩士 === 國立中山大學 === 海洋環境及工程學系研究所 === 98 === Taiwan semiconductor manufacturing industry ranks top in the world for the production and has a great contribution to Taiwan economics. However, the industry produces a significant amount of volatile organic compounds (VOC) into the air. According to EPA of...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2010
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Online Access: | http://ndltd.ncl.edu.tw/handle/67700774020785291383 |