Semiconductor Assembly Manufacturing Industry Control of Volatile Organic Compounds by Wet Scrubbing and Advanced Oxidation Technology--Case Feasibility Studies of Full-Scale Plant--

碩士 === 國立中山大學 === 海洋環境及工程學系研究所 === 98 === Taiwan semiconductor manufacturing industry ranks top in the world for the production and has a great contribution to Taiwan economics. However, the industry produces a significant amount of volatile organic compounds (VOC) into the air. According to EPA of...

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Bibliographic Details
Main Authors: Shu-hung Yeh, 葉書宏
Other Authors: lei Yang
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/67700774020785291383

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