Recycling of Back Grinding Wastewater from Semi-Conductor Industry: a Feasibility Study

碩士 === 國立中山大學 === 環境工程研究所 === 98 === Back grinding (BG) wastewater consists mainly of high-purity water and high concentrations of inorganic particles. If the BG wastewater could be treated and recycled efficiently, it should be sort of economic benefit. In this study, appropriate pre-treatment tech...

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Bibliographic Details
Main Authors: Ya-hsin Chen, 陳雅欣
Other Authors: Jimmy C. M. Kao
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/66848689913430193116