Construction of an expert system for semiconductor etching process
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 98 === The market share of Taiwan semiconductor manufacturing industry is in the first place in global. The production mode has to be continuously keeping high output value and equipment utilization. In this way, the engineers are requested to be on call at any time...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/85419430515396711779 |