A Dynamic Adjusted Proportional-Integral Controller for Semiconductor Manufacturing and an Empirical Study of Critical Dimension and Overlay Errors
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 98 === Semiconductor industry and its products change fast with time. There are about 300 to 500 processes in semiconductor manufacturing, and there are many factors affecting each process. Therefore, it is hard to estimate the input-output model for one process, an...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64556414674496491360 |