The deposition of silicon thin film by RF PE-CVD using silicon tetrachloride as precursor
碩士 === 國立清華大學 === 材料科學工程學系 === 98
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/27096562511040428556 |