The deposition of silicon thin film by RF PE-CVD using silicon tetrachloride as precursor
碩士 === 國立清華大學 === 材料科學工程學系 === 98
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ndltd-TW-098NTHU51590212016-04-25T04:27:13Z http://ndltd.ncl.edu.tw/handle/27096562511040428556 The deposition of silicon thin film by RF PE-CVD using silicon tetrachloride as precursor 利用射頻電漿輔助化學氣相沈積法以四氯化矽為前驅物成長矽薄膜 葉敬群 碩士 國立清華大學 材料科學工程學系 98 戴念華 李紫原 2010 學位論文 ; thesis 76 zh-TW |
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zh-TW |
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Others
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碩士 === 國立清華大學 === 材料科學工程學系 === 98 |
author2 |
戴念華 |
author_facet |
戴念華 葉敬群 |
author |
葉敬群 |
spellingShingle |
葉敬群 The deposition of silicon thin film by RF PE-CVD using silicon tetrachloride as precursor |
author_sort |
葉敬群 |
title |
The deposition of silicon thin film by RF PE-CVD using silicon tetrachloride as precursor |
title_short |
The deposition of silicon thin film by RF PE-CVD using silicon tetrachloride as precursor |
title_full |
The deposition of silicon thin film by RF PE-CVD using silicon tetrachloride as precursor |
title_fullStr |
The deposition of silicon thin film by RF PE-CVD using silicon tetrachloride as precursor |
title_full_unstemmed |
The deposition of silicon thin film by RF PE-CVD using silicon tetrachloride as precursor |
title_sort |
deposition of silicon thin film by rf pe-cvd using silicon tetrachloride as precursor |
publishDate |
2010 |
url |
http://ndltd.ncl.edu.tw/handle/27096562511040428556 |
work_keys_str_mv |
AT yèjìngqún thedepositionofsiliconthinfilmbyrfpecvdusingsilicontetrachlorideasprecursor AT yèjìngqún lìyòngshèpíndiànjiāngfǔzhùhuàxuéqìxiāngchénjīfǎyǐsìlǜhuàxìwèiqiánqūwùchéngzhǎngxìbáomó AT yèjìngqún depositionofsiliconthinfilmbyrfpecvdusingsilicontetrachlorideasprecursor |
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1718232796047081472 |