Study on the fabrication method for Si1-xGex nanowires

碩士 === 國立清華大學 === 材料科學工程學系 === 98 === According to Moore’s law, the number of transitors on a computer chip would double every 18~24 months. Therefore, in order to achieve the goals of high operation speed and high device density, semiconductor industrials keep downscaling the size of MOSFETs. H...

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Bibliographic Details
Main Authors: Lin, Yu-Min, 林祐民
Other Authors: Tsai, Cho-Jen
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/11656256789160134610