Integration and Implementation of CMOS-MEMS z-axis Microaccelerometer and Capacitive Sensing Circuits
碩士 === 國立清華大學 === 動力機械工程學系 === 98 === This study presents a capacitance sensing circuit with high sensitivity and linearity, by integrating a vertical microaccelerometer. The proposed capacitive sensing circuit is composed of a capacitance-voltage converter to amplify the readout signals, and a diff...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/30793439957568038049 |