Vibration Characteristics Analysis and Modal Testing of a Turbo Molecular Pump Rotor-Bearing System
碩士 === 國立清華大學 === 動力機械工程學系 === 98 === This study is focused on the dynamic characteristics of a vertical turbo molecular pump rotor-bearing system. The research methods can be divided into two parts, which are numerical analysis and experimental measurements. In numerical analysis, we use the finite...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2010
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Online Access: | http://ndltd.ncl.edu.tw/handle/50303943730299618843 |