Vibration Characteristics Analysis and Modal Testing of a Turbo Molecular Pump Rotor-Bearing System

碩士 === 國立清華大學 === 動力機械工程學系 === 98 === This study is focused on the dynamic characteristics of a vertical turbo molecular pump rotor-bearing system. The research methods can be divided into two parts, which are numerical analysis and experimental measurements. In numerical analysis, we use the finite...

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Bibliographic Details
Main Authors: Huang, Yu-Meng, 黃裕盟
Other Authors: Chiang, Hsiao-Wei D.
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/50303943730299618843