Liquid-Phase Sensors Using InN Ion Sensitive Field Effect Transistor Structure
博士 === 國立清華大學 === 電子工程研究所 === 98 === Ion selective field effect transistor (ISFETs) based on single crystal indium nitride (InN) film have been demonstrated for detecting pH values, anions and polarity in liquids. Three kinds of InN ISFETs containing 10-nm-thick, 1-um-thick and 1.2 um, magnesium (Mg...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/74558473038760431296 |