A study on Fabrication of High-Brilliance Random-Dotting Light Guide Plate Via Scanning Immersion Lithography
碩士 === 國立清華大學 === 工程與系統科學系 === 98 === This study propose using the scanning immersion lithography (SIL) technique to fabricate the light guide plate (LGP) with random-dotting micro prism array. Via applying a matching liquid between the mask/resist, the diffraction error of the gap can be effectivel...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45536239726870336929 |