Characterization and Two-Bit Operation Study of Flash Memory with Al2O3 Blocking Layer and TaN Metal Gate

碩士 === 國立清華大學 === 工程與系統科學系 === 98 === Compared with the amorphous-Si thin film transistors (TFTs), low-temperature poly-Si (LTPS) TFTs have higher mobility that help shrinking the transistor dimension, enhance the circuit operation speed, increase the transistor density on circuit, and add function...

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Bibliographic Details
Main Authors: Chen, Jiang-Hung, 陳江宏
Other Authors: Wu, Yung-Chun
Format: Others
Language:en_US
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/81933356324882937762