Study of hydrogenated microcrystalline silicon thin film solar cell deposited by VHF-PECVD
碩士 === 國立臺南大學 === 光電工程研究所 === 98 === The characterization of μc-Si:H thin film and p-type μc-Si:H thin film is important to improve the efficiency of microcrystalline silicon solar cells. In this study, the VHF-PECVD(Very High Frequency Plasma Enhanced Chemical Vapor Deposition) system was used to d...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63398732236648709181 |