Colored and Timed Petri Net-based operation sequence control logic modeling of physical vapor deposition (PVD) equipment
碩士 === 國立臺灣大學 === 工業工程學研究所 === 98 === Capital investment of a 300mm semiconductor fab has grown to 3-4 billions USD as the technology evolves. Equipment cost per fab may count up to 74% of the capital investment. Individual tool performance has therefore been even more critical to fab productivity a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/74377201695023943541 |