Study of an Atmospheric Pressure, Pulsed Arc Plasma Jet: Downstream Characterization and its Application to ZnO Thin Film Deposition
碩士 === 國立臺灣大學 === 化學工程學研究所 === 98 === An atmospheric pressure nitrogen plasma jet sustained by a repetitive pulsed DC power source is studied. The afterglow characteristics of this plasma jet are studied by an optical emission spectrometer and thermocouples. The effects of the process parameters,...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66334563900260159711 |