Study of an Atmospheric Pressure, Pulsed Arc Plasma Jet: Downstream Characterization and its Application to ZnO Thin Film Deposition
碩士 === 國立臺灣大學 === 化學工程學研究所 === 98 === An atmospheric pressure nitrogen plasma jet sustained by a repetitive pulsed DC power source is studied. The afterglow characteristics of this plasma jet are studied by an optical emission spectrometer and thermocouples. The effects of the process parameters,...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2010
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Online Access: | http://ndltd.ncl.edu.tw/handle/66334563900260159711 |