Measurements and Analyses of MEMS Gyroscopes and Accelerometers
碩士 === 國立臺灣大學 === 光電工程學研究所 === 98 === In the research of MEMS gyroscope, frequency matching is an important issue. In the High-Q condition, the bandwidth of resonance frequency is very narrow and the amplitude is very great.So the fabrication has to be accurate. Normally, there are several meth...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32426680534106874343 |