A study of nano-laminatd gas barrier films by using atomic layer deposition
碩士 === 臺灣大學 === 材料科學與工程學研究所 === 98 === This study developed nano-laminated gas-permeation barriers with atomic layer deposition (ALD) to achieve low gas permeability, high flexibility/bendability, and in-air stability. Two material systems were investigated: Al2O3/HfO2 (AHO) and Al2O3/ZnO (AZO), the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19583838242072281736 |