Development of Position Control for an Active Pneumatic Isolation Table System via High Speed on/off Valves
碩士 === 臺灣大學 === 工程科學及海洋工程學研究所 === 98 === This study aims to develop the position control of an active PWM (Pulse Width Modulation)-controlled pneumatic isolation table system. A novel concept using parallel dual-on/off valves with PWM control signals is implemented to realize active control and to i...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/88866006955479016608 |