Spectrum Diagnosis and Parallel Optical Simulation
碩士 === 臺灣大學 === 電子工程學研究所 === 98 === To ensure the quality of the nanoprint fabricated optical gratings, optical scatterometry (OS) is an efficient and effective mean to diagnose the actual fabricated geometry. To facilitate the diagnosis process, efficient pattern matching algorithms over a huge dat...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/43195503258173162417 |