Design and assembly methodology of the structure of highprecision 3-axis linear stage in nanometer accuracy
碩士 === 臺灣大學 === 機械工程學研究所 === 98 === This thesis studies and develops the design and assembly methodology of Nano-scale measurement machines. Three types of machines are developed, namely a micro coordinate measuring machine (Micro-CMM), a co-planar stage of micro milling machine, and a nano height g...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95039920443394101860 |