Structural Design and Analysis of a Precision Positioning Planar Motion Stage
碩士 === 臺灣大學 === 機械工程學研究所 === 98 === This study proposes the structural design and analysis of a precision positioning planar motion stage. The planar motion stage will have characteristics of high precision, long travel range, and nano-positioning accuracy. The stage consists of a stage base, a carr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35942933766620786196 |