Design and Fabrication of RF-MEMS Components: Tunable HTS Resonator and Low Pull-In Voltage Capacitive Switch
博士 === 臺灣大學 === 應用力學研究所 === 98 === Employing micromachined technology in wireless communication system to improve its performance has been studied and practiced for decades. The main micromachined components include high-Q inductors, tunable capacitors, and micromachined switches, etc. In this study...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25405285721061088198 |