Fabrication of Photoresist Nanostructures on the Silicon Surface by E-beam lithography and Characterization of Adhesion Property
碩士 === 國立臺灣科技大學 === 高分子系 === 98 === In this study, nanostructures of photoresists were fabricated by e-beam lithography to investigate the surface property. The positive photoresist was used to fabricate square hole matrixes. The resolutions and duty ratios (hole width /hole spacing) of these square...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/08876328151838368455 |