Amorphous Silicon Thin Film Solar Cells Prepared by RF SiH4-PECVD System
碩士 === 國立臺灣科技大學 === 化學工程系 === 98 === In this thesis, the intrinsic hydrogenated amorphous silicon (a-Si:H) thin films and p-type hydrogenated amorphous silicon carbide (a-SiC:H) thin film were deposited on glass by radio-frequency silane plasma enhanced chemical vapor deposition system. The thin fil...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45483698170052040821 |