Process and Structure Design of Microcrystalline Silicon Thin-Film-Transistors (μC-Si TFTs)
碩士 === 國立臺灣科技大學 === 電子工程系 === 98 === Microcrystalline silicon thin-film-transistors (μC-Si TFTs) have been widely studied. Due to better device characteristic, and large area growth using a lower temperature process, compared to amorphous silicon thin-film-transistors, it has larger electron field m...
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| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57982851018671873312 |