Fabrication and Measurement on Low Loss Silicon Wire Waveguide
碩士 === 國立臺灣科技大學 === 電子工程系 === 98 === The main research in this dissertation is to demonstrate the high quality silicon wire waveguide using the well-developed submicron waveguide theory, I-Line lithography, and 0.02 high resolution optical mode characterization. Due to the main loss effect on the su...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61020121567595627808 |