Characteristics of pulsed DC reactive magnetron sputtered nanocomposite Cr-Zr-N and Cr-Zr-Si-N thin films
碩士 === 國立臺灣科技大學 === 機械工程系 === 98 === The chromium nitride thin film have a good mechanical properties and oxidation resistance. but the drawback is the slightly lower hardness then other hard coatings. the concept of nanocomposite thin films is employed by adding silicon and zirconium to enhanced mi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14683679469864220269 |