Study on Hysteresis Compensation andTracking Control of a Biaxial Piezo Stage
碩士 === 國立臺灣科技大學 === 機械工程系 === 98 === This thesis presents the hysteresis compensation and precision tracking control of a developed biaxial piezo stage. The piezo stage has been widely used in precision engineering fields because of the characteristics of large force and fast response. However, the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/83385256784148433589 |