A study of fast hot embossing processes for micro and nano structure fabrication
碩士 === 國立臺灣科技大學 === 機械工程系 === 98 === Hot embossing is one of the micro/nano imprint techniques and an alternative candidate for the next generation patterning technology. However, the process needs a long cycle from heating, pressing to cooling. It has to be improved in order to become an efficient...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89212827375138131669 |