Flow-Field Simulation of the Wafer Loading Area in a Vertical Furnace
碩士 === 國立臺灣科技大學 === 機械工程系 === 98 === The goal of this numerical investigation is to study the loading area of wafer boat in a vertical furnace, which is the major production equipment in the semiconductor factory. Main focus is set on exploring the detailed distributions of flow field and pollutant...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13410962695150604353 |