Study and Fabrication of ZnO-doped Nd(Co1/2Ti1/2)O3 Dielectric Thin Films by Using RF Magnetron Sputtering Method
碩士 === 國立聯合大學 === 電機工程學系碩士班 === 98 === In this study, effects of electrical and physical properties of ZnO-doped ZnO-doped Nd(Co1/2Ti1/2)O3 thin films by rf magnetron sputtering have been investigated. All of the films were deposited at a fixed operating pressure of 5 mTorr and a deposition time of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48893796609865811959 |