Apply TiO2 thin film to surface acoustic wave device
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 98 === TiO2 films were deposited on ST-cut quartz by radio frequency magnetron sputtering. The crystalline structure, surface morphology and luminescent characteristics of films were examined by X-ray diffraction, scanning electron microscopy, and photoluminescence...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95yu8z |