Development of a Nano-Positioning alignment stage for the nano imprint device
碩士 === 國立虎尾科技大學 === 機械與機電工程研究所 === 98 === Abstract This paper presents the design, analysis, assembly, calibration and measurement of a 3-DOF nano-positioning alignment system for the nano imprint device with dual-grating interferometer alignment system as feedback. This 3-DOF nano-positioning align...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/t3q9ud |