The Detection System of Wafer Defects Clustering Patterns Implemented by Image Recognition Methods
碩士 === 聖約翰科技大學 === 電機工程系碩士在職專班 === 98 === In semiconductor manufacturing, the wafer map can provide the clues to identify process defects due to equipment abnormality, which can help engineers to find out the root causes of defects.In the past, the recognition of wafer map is performed by human oper...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/05307596606985660616 |