Study of Amorphous Silicon Film Using Ion Beam Sputtering

碩士 === 南台科技大學 === 光電工程系 === 98 === In recent years, due to the energy shortage and global warming lead the green energy issues become very important. The researches in Thin Film Solar Cells received a lot of attentions. To fabricate amorphous silicon thin film solar cells using plasma-enhanced chemi...

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Bibliographic Details
Main Authors: Jin-Cheng Tsai, 蔡進成
Other Authors: Wen-Tuan Wu
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/58589176068318499965