Fabrication of pH-ISFET using Sol-Gel Derived CBT Thin Film Gate
碩士 === 南台科技大學 === 電子工程系 === 98 === Abstract Recently, pH-ISFET have played an important role in the bio-medical applications and become attractive devices gradually. The main technique of pH-ISFET is removing the metal float gate of the MOSFET, and putting inside the testing solution. The silicon ox...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/55600890903951885564 |