Establishment of an Online Energy Saving Assessment System for Semiconductor Clean Room
碩士 === 亞洲大學 === 資訊工程學系碩士在職專班 === 98 === In this study, the energy consumptions of air-conditioning temperature and humidity, Fan Filter Unit (FFU), lighting, and boiler systems of a semiconductor factory clean room were analyzed, and the possible and feasible way of energy savings, the mode of calcu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28430002790545819421 |