DEVELOPMENT OF NEW IN-SITU CONFOCAL MICROSCOPIC SURFACE PROFILOMETRY WITH VIBRATION RESISTANCE CAPABILITY
碩士 === 國立臺北科技大學 === 自動化科技研究所 === 98 === In the article, an in-situ three-dimensional microscopic surface profilometer employing novel lateral confocal scanning principle was developed to achieve on-line measurement with effective vibration resistance capability. The developed methodology combines di...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/s823v3 |