Research of Tribology and Properties of TiSiN by Cathode Current
碩士 === 國立臺北科技大學 === 材料科學與工程研究所 === 98 === he cathode arc depositions of TiSiN coatings for tool application are investigated. A filtered cathode arc deposition system is employed to deposite TiSiN in N2 reacting atmosphere using a Ti-Si alloy as the arc source. The effects of cathode current on the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/h2s29p |